产品介绍
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PCT-150/200CRS是PicoTrack最新的产品,采用自己研发的中心手臂,适用于大多数光刻工艺,包括正胶,负胶,Polymide,PIX工艺,可选配VPC,FFU,CCR,显影液温控和SEM/SECS,可实现与Canon stepper或PE光刻机inline
设备参数
PCT-150/200CRS
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设备名称 | PCT-150/200CRS |
Spin motor | servo motor up to 7000rpm,acc up to 30000rpm/s,speed accuracy:±2rpm 可升级至重型servo motor |
Configuration | dual central arm. up to 2C2D , 4C or 4D ,max 16HPO, |
opions | VPC,FFU,CCR,DEV /PR TEMP CONTROL,SEM/SECS |
适用工艺 | 正胶,负胶,Polymid,PIX,Glass powder, |
设备图片
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